Structural modifications of diamond films induced by pulsed laser treatment

P. Ascarelli; Emilia Cappelli; Stefano Orlando; F. Pinzari

doi:10.1117/12.308613

26 May 1998 Structural modifications of diamond films induced by pulsed laser treatment

P. Ascarelli, Emilia Cappelli, Stefano Orlando, F. Pinzari

Proceedings Volume 3404, ALT'97 International Conference on Laser Surface Processing; (1998) https://doi.org/10.1117/12.308613
Event: ALT '97 International Conference on Laser Surface Processing, 1997, Limoges, France

Abstract

Diamond thin films promise excellent performances in several high value applications such as high temperature and high frequency electronic devices, as electrode material in electrochemistry, and as a protective coating for components operating in aggressive environments. These interesting perspectives, however, are actually limited by the polycrystalline, randomly oriented morphology of CVD deposited films, which results in a noticeable surface roughness with some presence of pin holes. Many methods have been tried to polish diamond, the hardest known material; a very simple and effective one seems to be the irradiation with high energy pulsed lasers. The purpose of this work is to get a deeper insight into the interactions and effects of intense laser radiation on diamond, a wide band gap material, and to explore the optimal experimental conditions to smooth the surface roughness and eventually to fill in the pin-holes. HF-CVD deposited diamond films have been treated by radiations of energy values larger (ArF, (lambda) equals 193 nm, hv is congruent to 6.4 eV) and smaller (Nd:YAG, (lambda) is congruent to 532 nm, hv is congruent to 2.3 eV) than the electronic energy gap (hv is congruent to 5.4 eV). The surface morphology modifications have been studied by SEM. Raman spectroscopy was employed to evaluate some phase transition in the C component (diamond yields DLC yields graphite yields amorphous C).

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P. Ascarelli, Emilia Cappelli, Stefano Orlando, and F. Pinzari "Structural modifications of diamond films induced by pulsed laser treatment", Proc. SPIE 3404, ALT'97 International Conference on Laser Surface Processing, (26 May 1998); https://doi.org/10.1117/12.308613

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