Performance evaluation of a lead-titanate (PbTiO3) pyroelectric thin-film infrared sensor with temperature isolation improvement structure by microelectromechanical system (MEMS) technologies

Jyh-Jier Ho; Yuen Keun Fang; Chin-Ying Chen; G. S. Chen; M. S. Ju

doi:10.1117/12.311014

22 June 1998 Performance evaluation of a lead-titanate (PbTiO₃) pyroelectric thin-film infrared sensor with temperature isolation improvement structure by microelectromechanical system (MEMS) technologies

Jyh-Jier Ho, Yuen Keun Fang, Chin-Ying Chen, G. S. Chen, M. S. Ju

Author Affiliations +

Proceedings Volume 3419, Optoelectronic Materials and Devices; 34190U (1998) https://doi.org/10.1117/12.311014
Event: Asia Pacific Symposium on Optoelectronics '98, 1998, Taipei, Taiwan

Abstract

An IR sensor with the lead-titanate thin-film using the technology of micro-electro-mechanical systems to achieve a better thermal isolation structure has been fabricated and developed. The major IR-sensing part on the cantilever beam with dimensions of 200 X 100 X 2 micrometers ³ consists of a 500-angstrom lead-titanate layer deposited by RF sputtering, and an evaporated bismuth layer. This thermal isolation improved structure exhibits a much superior performance to that of a traditional IR-sensing bulk structure on the experimental results, which show a 200 percent and 300 percent improvement in current gain under the incident optical power 500 (mu) W and 6V applied bias at room temperature and 77 degrees K, respectively.

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Jyh-Jier Ho, Yuen Keun Fang, Chin-Ying Chen, G. S. Chen, and M. S. Ju "Performance evaluation of a lead-titanate (PbTiO₃) pyroelectric thin-film infrared sensor with temperature isolation improvement structure by microelectromechanical system (MEMS) technologies", Proc. SPIE 3419, Optoelectronic Materials and Devices, 34190U (22 June 1998); https://doi.org/10.1117/12.311014

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