Residual stresses in Mo/Si and Mo2C/Si multilayers

Tai D. Nguyen; Troy W. Barbee Jr.

doi:10.1117/12.331274

19 November 1998 Residual stresses in Mo/Si and Mo₂C/Si multilayers

Tai D. Nguyen, Troy W. Barbee Jr.

Proceedings Volume 3444, X-Ray Optics, Instruments, and Missions; (1998) https://doi.org/10.1117/12.331274
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1998, San Diego, CA, United States

Abstract

We report a study of the residual stresses and residual stress relaxation in Mo/Si and Mo₂C/Si EUV multilayers. The multilayers were fabricated by magnetron sputter deposition, and stress measured using the substrate curvature laser scanning technique. It was found that Mo₂C/Si multilayers exhibit higher compressive stress than Mo/Si of comparable period and layer thickness ratio. The multilayers sputtered at 0.5 mT Ar pressure have higher compressive stress than those sputtered at 2 mT Ar pressure. The data indicate that the residual stresses in the multilayers are primarily determined by the Si layers. Annealing of the multilayers at a heating rate of 5 degrees C/minute as well as at a fixed temperature results in a reduction of the compressive stresses. Near zero stress is achieved after annealing at 300 degrees C. The time dependence of the residual stress decrease during isothermal annealing was found to fit best to a bimolecular viscous flow model of defect annihilation in the amorphous Si layers. The relationships between the effects of annealing on the multilayer microstructure and the observed stress reduction are discussed.

Citation Download Citation

Tai D. Nguyen and Troy W. Barbee Jr. "Residual stresses in Mo/Si and Mo₂C/Si multilayers", Proc. SPIE 3444, X-Ray Optics, Instruments, and Missions, (19 November 1998); https://doi.org/10.1117/12.331274

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available