PROCEEDINGS VOLUME 3508
MICROELECTRONIC MANUFACTURING | 20-24 SEPTEMBER 1998
Multilevel Interconnect Technology II
Editor(s): Mart Graef, Divyesh N. Patel
Editor Affiliations +
IN THIS VOLUME

7 Sessions, 25 Papers, 0 Presentations, 0 Posters
CMP  (3)
MICROELECTRONIC MANUFACTURING
20-24 September 1998
Santa Clara, CA, United States
Dielectric Layer Process Integration
Yoshihiro Hayashi, Takahiro Onodera, Shinobu Saitoh, Jyun Kawahara
Proceedings Volume Multilevel Interconnect Technology II, (1998) https://doi.org/10.1117/12.324023
Michael Olewine, Ralph N. Wall, Gus J. Colovos
Proceedings Volume Multilevel Interconnect Technology II, (1998) https://doi.org/10.1117/12.324032
Poster Session
Ting-Chang Chang, P. T. Liu, M. F. Chou, Ming-Shih Tsai, Simon M. Sze, Chun-Yen Chang, F. Y. Shih, H. D. Huang
Proceedings Volume Multilevel Interconnect Technology II, (1998) https://doi.org/10.1117/12.324044
Dielectric Layer Process Integration
Sara E. Kim, Christoph O. Steinbruchel, Atul Kumar, H. Bakhru
Proceedings Volume Multilevel Interconnect Technology II, (1998) https://doi.org/10.1117/12.324045
Barrier Layer Process Integration
Imran Hashim, Vikram Pavate, Peijun Ding, Barry Chin, Dirk Brown, Takeshi Nogami
Proceedings Volume Multilevel Interconnect Technology II, (1998) https://doi.org/10.1117/12.324046
Sergey D. Lopatin, Yosi Y. Shacham-Diamand, Valery M. Dubin, Yoon So Kim, P. K. Vasudev
Proceedings Volume Multilevel Interconnect Technology II, (1998) https://doi.org/10.1117/12.324047
Etching and Cleaning
Didier Louis, Catherine Peyne, Emile Lajoinie, B. Vallesi, David J. Maloney, Shihying Lee
Proceedings Volume Multilevel Interconnect Technology II, (1998) https://doi.org/10.1117/12.324024
Sang Yee Loong, Hian Kee Lee, Mei-Sheng Zhou, Lap Hung Chan, Vayalakkara Premachandran
Proceedings Volume Multilevel Interconnect Technology II, (1998) https://doi.org/10.1117/12.324025
Simon Y. M. Chooi, Zainab Ismail, Ping-Yu Ee, Mei-Sheng Zhou
Proceedings Volume Multilevel Interconnect Technology II, (1998) https://doi.org/10.1117/12.324026
Simon Y. M. Chooi, Vincent K.T. Sih, Soh Yun Siah, Zainab Ismail, Mei-Sheng Zhou
Proceedings Volume Multilevel Interconnect Technology II, (1998) https://doi.org/10.1117/12.324027
Eric Wagganer, George Mueller, Stephen F. Clark, Kenneth J. Newton
Proceedings Volume Multilevel Interconnect Technology II, (1998) https://doi.org/10.1117/12.324028
Poster Session
Ming-Shih Tsai, Jias-Sheng Lin, Bau-Tong Dai
Proceedings Volume Multilevel Interconnect Technology II, (1998) https://doi.org/10.1117/12.324029
CMP
Manabu Tsujimura
Proceedings Volume Multilevel Interconnect Technology II, (1998) https://doi.org/10.1117/12.324030
F. A. Tony Schraub, John Boyd, Jim Valentine, John Curry
Proceedings Volume Multilevel Interconnect Technology II, (1998) https://doi.org/10.1117/12.324031
Sanjay Basak, Malcolm Grief, Anand Gupta, Krishna Murella, Barrie VanDevender
Proceedings Volume Multilevel Interconnect Technology II, (1998) https://doi.org/10.1117/12.324033
Multilevel Metal Process Integration
Hans Helneder, Manfred Schneegans, K. Schober, Hans-Joachim Barth, U. Richter, G. Scheinbacher
Proceedings Volume Multilevel Interconnect Technology II, (1998) https://doi.org/10.1117/12.324038
J. D. Yang, Chuan-Chieh A. Lin, Anthony Yen, Sen-Fu Chen, Chao-Hsin Chang, Jie-Shin Wu, J. R. Wu
Proceedings Volume Multilevel Interconnect Technology II, (1998) https://doi.org/10.1117/12.324039
Juergen Foerster, Werner K. Robl, Norbert Rausch, Manfred Frank, D. Butler, Paul Rich, J. Marktanner
Proceedings Volume Multilevel Interconnect Technology II, (1998) https://doi.org/10.1117/12.324040
Jeffrey R. D. DeBord, Vidyasagar Jayaraman, Melissa M. Hewson, Wei W. Lee, John Robert Ilzhoefer
Proceedings Volume Multilevel Interconnect Technology II, (1998) https://doi.org/10.1117/12.324041
Samit S. Sengupta, Subhas Bothra
Proceedings Volume Multilevel Interconnect Technology II, (1998) https://doi.org/10.1117/12.324042
Proceedings Volume Multilevel Interconnect Technology II, (1998) https://doi.org/10.1117/12.324043
Plenary Papers
Proceedings Volume Multilevel Interconnect Technology II, (1998) https://doi.org/10.1117/12.324034
Daniel C. Edelstein
Proceedings Volume Multilevel Interconnect Technology II, (1998) https://doi.org/10.1117/12.324035
Jack Y. C. Sun
Proceedings Volume Multilevel Interconnect Technology II, (1998) https://doi.org/10.1117/12.324036
Alain S. Harrus, John Kelly, Ronald A. Powell
Proceedings Volume Multilevel Interconnect Technology II, (1998) https://doi.org/10.1117/12.324037
Back to Top