High-yield assembly of hinged 3D optical MEMS devices using magnetic actuation

Yong Yi; Chang Liu

doi:10.1117/12.324290

31 August 1998 High-yield assembly of hinged 3D optical MEMS devices using magnetic actuation

Yong Yi, Chang Liu

Proceedings Volume 3511, Micromachining and Microfabrication Process Technology IV; (1998) https://doi.org/10.1117/12.324290
Event: Micromachining and Microfabrication, 1998, Santa Clara, CA, United States

Abstract

We have developed a new magnetic actuation process for hinged, surface micromachined structures to assemble three-dimensional optical devices with high efficiency and high yield. Electroplated magnetic material (Permalloy) is integrated with two types of hinged microstructures and the magnetic actuation process has been experimentally characterized. Under a given external magnetic field, the angular displacement of a hinged structure is determined by the volume of the magnetic material or by the stiffness of an auxiliary flexural loading spring. Preliminary design rules for achieving asynchronous actuation of hinged microstructures have been established to enable effective parallel assembly of three-dimensional devices. We have demonstrated parallel actuation of arrays of individual microstructures and three-dimensional assemblies under a globally applied external magnetic field.

Citation Download Citation

Yong Yi and Chang Liu "High-yield assembly of hinged 3D optical MEMS devices using magnetic actuation", Proc. SPIE 3511, Micromachining and Microfabrication Process Technology IV, (31 August 1998); https://doi.org/10.1117/12.324290

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