Multidimensional chemical sensors for chip-scale electronic packages

Anita Sargent; John Gaudiello; Omowunmi A. Sadik

doi:10.1117/12.341023

26 February 1999 Multidimensional chemical sensors for chip-scale electronic packages

Anita Sargent, John Gaudiello, Omowunmi A. Sadik

Proceedings Volume 3537, Electro-Optic, Integrated Optic, and Electronic Technologies for Online Chemical Process Monitoring; (1999) https://doi.org/10.1117/12.341023
Event: Photonics East (ISAM, VVDC, IEMB), 1998, Boston, MA, United States

Abstract

The study of dimethylamineborane, as the reducing agent in electroless deposition of gold, was conducted using electrochemical, elemental and spectroscopic methods. The validity of the mixed potential theory of electroless deposition of metals was used to explain the influence of fluctuating chemical concentrations in the bath. Experimental measurements showed that plating rate depends on the fluctuating concentrations of gold, hydroxide, cyanide and the reducing agents among other variables. The fluctuating chemical concentrations can be monitored using the novel automated chemical sensors discussed.

Citation Download Citation

Anita Sargent, John Gaudiello, and Omowunmi A. Sadik "Multidimensional chemical sensors for chip-scale electronic packages", Proc. SPIE 3537, Electro-Optic, Integrated Optic, and Electronic Technologies for Online Chemical Process Monitoring, (26 February 1999); https://doi.org/10.1117/12.341023

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