Measurement of spatial coherence of KrF excimer laser

Jiansheng Liu; Jingru Liu; Yanming Wei

doi:10.1117/12.344118

7 August 1998 Measurement of spatial coherence of KrF excimer laser

Jiansheng Liu, Jingru Liu, Yanming Wei

Proceedings Volume 3549, High-Power Lasers: Solid State, Gas, Excimer, and Other Advanced Lasers II; (1998) https://doi.org/10.1117/12.344118
Event: Photonics China '98, 1998, Beijing, China

Abstract

A kind of reversal shear interferometer has been designed to measure the temporal change of spatial coherence of KrF excimer laser with an unstable resonator. By this method, we can obtain the degree of spatial coherence from a single measurement. At different shear distance, using slit and photodetector we have observed the stepwise increase of the degree of spatial coherence at intervals equal to the transit time of resonator. Moreover, ray matrix has been used to analyze the propagation of partial coherent light and the coherence widths of successive passes are calculated.

Citation Download Citation

Jiansheng Liu, Jingru Liu, and Yanming Wei "Measurement of spatial coherence of KrF excimer laser", Proc. SPIE 3549, High-Power Lasers: Solid State, Gas, Excimer, and Other Advanced Lasers II, (7 August 1998); https://doi.org/10.1117/12.344118

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