Optical sensitivity to NOx of Ag-doped ZnO thin films

Hongbo He; Zhengxiu Fan

doi:10.1117/12.318151

13 August 1998 Optical sensitivity to NO_x of Ag-doped ZnO thin films

Hongbo He, Zhengxiu Fan

Proceedings Volume 3555, Optical and Fiber Optic Sensor Systems; (1998) https://doi.org/10.1117/12.318151
Event: Photonics China '98, 1998, Beijing, China

Abstract

In this paper, pure and Ag-doped zinc oxide (ZnO) optical sensing thin films were deposited by reactive magnetron sputtering (rf) for detection of nitrogen oxide (NO_x) gas. The optical sensitivity was tested in a vacuum system by introducing NO_x. The transmission spectra of these films were measured at first, then the variation of sensitivity was derived form the transmission spectra. It was found that the sensitivity to NO_x of Ag-doped ZnO films was higher than that of pure ZnO films. The changes of sensitivity with NO_x pressure and concentration of dopant Ag were also studied in the paper. The concentration of dopant Ag varies form 1 percent to 18 percent, which was examined by Auger Electron Spectroscopy. The best sensitivity to NO_x was achieved with ZnO optical sensing thin film which was doped by 5 percent Ag. It may be developed by considering the Langmuir-type adsorption equilibrium relation and it shows that the theoretic analyses coincide excellently with the experimental results.

Citation Download Citation

Hongbo He and Zhengxiu Fan "Optical sensitivity to NO_x of Ag-doped ZnO thin films", Proc. SPIE 3555, Optical and Fiber Optic Sensor Systems, (13 August 1998); https://doi.org/10.1117/12.318151

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