Signal-chip microcomputer control system for a diffraction grating ruling engine

Xiaolin Wang; Yuhua Zhang; Houmin Yang; Du Guo

doi:10.1117/12.318295

5 August 1998 Signal-chip microcomputer control system for a diffraction grating ruling engine

Xiaolin Wang, Yuhua Zhang, Houmin Yang, Du Guo

Proceedings Volume 3557, Current Developments in Optical Elements and Manufacturing; (1998) https://doi.org/10.1117/12.318295
Event: Photonics China '98, 1998, Beijing, China

Abstract

A control system with a chip of 8031 single-chip microcomputer as its nucleus for a diffraction grating ruling engine has been developed, its hardware and software are presented in this paper. A series of techniques such as program-controlled amplifier and interference fringes subdivision as well as motor velocity step governing are adopted to improve the control accuracy. With this control system, 8 kinds of gratings of different spacings can be ruled, the positioning precision of the diffraction grating ruling engine (sigma) equals 3.6 nm, and the maximum positioning error is less than 14.6 nm.

Citation Download Citation

Xiaolin Wang, Yuhua Zhang, Houmin Yang, and Du Guo "Signal-chip microcomputer control system for a diffraction grating ruling engine", Proc. SPIE 3557, Current Developments in Optical Elements and Manufacturing, (5 August 1998); https://doi.org/10.1117/12.318295

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