Real-time error compensation of coordinate measurement system using combined gratings

Wenjun Tang; Yukun Zhang; Minmo Duan; Lihua Li; Zhongyan Fang

doi:10.1117/12.318411

10 August 1998 Real-time error compensation of coordinate measurement system using combined gratings

Wenjun Tang, Yukun Zhang, Minmo Duan, Lihua Li, Zhongyan Fang

Proceedings Volume 3558, Automated Optical Inspection for Industry: Theory, Technology, and Applications II; (1998) https://doi.org/10.1117/12.318411
Event: Photonics China '98, 1998, Beijing, China

Abstract

This paper is concerned with enhancing the accuracy of the coordinate measurement system by compensating the Abbe error in real-time through combined gratings. This research is carried out on a 2D measuring system with a maximum moving range of 200mm X 100mm. According to its structure, a mathematical model using the rigid body assumption is deduced and altogether five metrology gratings are installed along two moving axes to compensate three angel errors according to this model. A special grating subdividing system is designed to realize 200 times subdivision for each of the five gratings. Experiment shows that this system can largely raise the accuracy of the coordinate measurement device. Besides, this research is also very valuable in the upgrading of machine tools.

Citation Download Citation

Wenjun Tang, Yukun Zhang, Minmo Duan, Lihua Li, and Zhongyan Fang "Real-time error compensation of coordinate measurement system using combined gratings", Proc. SPIE 3558, Automated Optical Inspection for Industry: Theory, Technology, and Applications II, (10 August 1998); https://doi.org/10.1117/12.318411

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