Submicron position and measurement system for optical edges

JiaHu Yuan

doi:10.1117/12.318401

10 August 1998 Submicron position and measurement system for optical edges

JiaHu Yuan

Proceedings Volume 3558, Automated Optical Inspection for Industry: Theory, Technology, and Applications II; (1998) https://doi.org/10.1117/12.318401
Event: Photonics China '98, 1998, Beijing, China

Abstract

Optical edges refer to the cut-lines of difference of optical transmissivity. They exist widely on optical coder. Generally the accuracy of edge's positions shows its quality. This paper describes an opto-electric measuring scheme, which integrates the edge's signal by means of linear CCD camera and identifies automatically its position through computer analysis. In the meantime a precise grating is used as measuring unit and a 2D scanning stage which is derived by stepping motors is designed for searching the edges. A microcomputer performs the functions of the system management, data sample and analysis. The measuring error is less than 0.3 micrometers .

Citation Download Citation

JiaHu Yuan "Submicron position and measurement system for optical edges", Proc. SPIE 3558, Automated Optical Inspection for Industry: Theory, Technology, and Applications II, (10 August 1998); https://doi.org/10.1117/12.318401

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