Paper
3 June 1999 Thin-walled compliant plastic structures for mesoscale fluidic systems
Robin R. Miles, Daniel L. Schumann
Author Affiliations +
Proceedings Volume 3606, Micro- and Nanofabricated Structures and Devices for Biomedical Environmental Applications II; (1999) https://doi.org/10.1117/12.350053
Event: BiOS '99 International Biomedical Optics Symposium, 1999, San Jose, CA, United States
Abstract
Thin-walled, compliant plastic structures for meso-scale fluidic systems were fabricated, tested and used to demonstrate valving, pumping, metering and mixing. These structures permit the isolation of actuators and sensors form the working fluid, thereby reducing chemical compatibility issues. The thin-walled, compliant plastic structures can be used in either a permanent, reusable system or as an inexpensive disposable for single-use assay systems. The implementation of valving, pumping, mixing and metering operations involve only an elastic change in the mechanical shape of various portions of the structure. Advantages provided by the thin-walled plastic structures include reduced dead volume and rapid mixing. Five different methods for fabricating the thin-walled plastic structures discussed including laser welding, molding, vacuum forming, thermal heat staking and photolithographic patterning techniques.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Robin R. Miles and Daniel L. Schumann "Thin-walled compliant plastic structures for mesoscale fluidic systems", Proc. SPIE 3606, Micro- and Nanofabricated Structures and Devices for Biomedical Environmental Applications II, (3 June 1999); https://doi.org/10.1117/12.350053
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Cited by 2 scholarly publications.
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KEYWORDS
Silicon

Actuators

Microfluidics

Semiconducting wafers

Laser welding

Photoresist materials

Liquids

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