Adaptive input shaping for precision stage systems

Douglas A. Hamilton; Gerald A. Sullivan; Dryver R. Huston

doi:10.1117/12.351567

9 July 1999 Adaptive input shaping for precision stage systems

Douglas A. Hamilton, Gerald A. Sullivan, Dryver R. Huston

Proceedings Volume 3674, Smart Structures and Materials 1999: Industrial and Commercial Applications of Smart Structures Technologies; (1999) https://doi.org/10.1117/12.351567
Event: 1999 Symposium on Smart Structures and Materials, 1999, Newport Beach, CA, United States

Abstract

Many manufacturing situations such as lithography for microelectronics require rapid high precision positioning of machinery. This paper will describe an existing stage system and its evolution with an emphasis upon reducing residual vibrations associated with stage stepping. Results of an experimental study are presented where the adaptive input shaping strategy and several input shaping strategy technique for the literature are used to generate motion commands. Stage performance is evaluated with an emphasis upon the affects of the stages natural frequency and mode shapes.

Citation Download Citation

Douglas A. Hamilton, Gerald A. Sullivan, and Dryver R. Huston "Adaptive input shaping for precision stage systems", Proc. SPIE 3674, Smart Structures and Materials 1999: Industrial and Commercial Applications of Smart Structures Technologies, (9 July 1999); https://doi.org/10.1117/12.351567

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