Advanced integrated solution for MEMS design

Karim Liateni; David Moulinier; Bachar Affour; H. Boutamine; Jean Michel Karam; D. Veychard; Bernard Courtois; Ariel D. Cao

doi:10.1117/12.341194

10 March 1999 Advanced integrated solution for MEMS design

Karim Liateni, David Moulinier, Bachar Affour, H. Boutamine, Jean Michel Karam, D. Veychard, Bernard Courtois, Ariel D. Cao

Author Affiliations +

Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341194
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France

Abstract

This paper presents a fully integrated solution for the development of Micro Electro Mechanical Systems which covers component libraries, design tools and designs methodologies which are used in conjunction with conventional design automation tools. This solutio enables system houses in wireless and optical communications and consumers electronics markets to reduce their internal development costs and significantly accelerate their product development cycles.

Citation Download Citation

Karim Liateni, David Moulinier, Bachar Affour, H. Boutamine, Jean Michel Karam, D. Veychard, Bernard Courtois, and Ariel D. Cao "Advanced integrated solution for MEMS design", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); https://doi.org/10.1117/12.341194

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