Bandwidth analysis of a microgyroscope vibrating in two orthogonal axes on the substrate plane

Yoonshik Hong; Jong-Hyun Lee; Chang Seung Lee; Won-Ick Jang; Chang-Auck Choi; Soo Hyun Kim; Yoon Keun Kwak

doi:10.1117/12.341161

10 March 1999 Bandwidth analysis of a microgyroscope vibrating in two orthogonal axes on the substrate plane

Yoonshik Hong, Jong-Hyun Lee, Chang Seung Lee, Won-Ick Jang, Chang-Auck Choi, Soo Hyun Kim, Yoon Keun Kwak

Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341161
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France

Abstract

A microgyroscope, which vibrates in two orthogonal axes on the substrate plane, is designed and fabricated. The shuttle mass of the vibrating gyroscope consists of two parts. The one is outer shuttle mass which vibrates in driving mode guided by four folded sprints attached to anchors. And the other is inner shuttle mass which vibrates in driving mode as the outer frame does and also can vibrate in sensing mode guided by four folded springs attached to the outer shuttle mass. Due to the directions of vibrating modes, it is possible to fabricate the gyroscope with simplified process by using polysilicon on insulator structure. Fabrication processes of the microgyroscope are composed of anisotropic silicon etching by RIE, gas-phase etching of the buried sacrificial oxide layer, metal electrode formation. An electromechanical model of the vibrating microgyroscope was modeled and bandwidth characteristics of the gyroscope were analyzed firstly. The analyzed characteristics of the gyroscope were evaluated by experiment. The gyroscope operates at DC 4V and AC 0.1V in a vacuum chamber of 100mtorr. The detection circuit consists of a discrete sense amplifier and a noise canceling circuit. Using the evaluated electromechanical mode, an operating condition for high performance of the gyroscope is obtained.

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Yoonshik Hong, Jong-Hyun Lee, Chang Seung Lee, Won-Ick Jang, Chang-Auck Choi, Soo Hyun Kim, and Yoon Keun Kwak "Bandwidth analysis of a microgyroscope vibrating in two orthogonal axes on the substrate plane", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); https://doi.org/10.1117/12.341161

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