Structured CAD methodology for integrated MEMS and IC design

Linh Nguyen; Hee Jung Lee; Mary Ann Perez-Maher; Ying Xu

doi:10.1117/12.341209

10 March 1999 Structured CAD methodology for integrated MEMS and IC design

Linh Nguyen, Hee Jung Lee, Mary Ann Perez-Maher, Ying Xu

Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341209
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France

Abstract

MEMS design tools are increasingly important as micro systems find wider applications. Though established structured design methodologies are in place for VLSI design, these tools cannot be applied to MEMS design without adaptation. Several needs must be met to enable MEMS design: (1) non-linear, dynamic and multi-energy domain design and simulation; (2) expression of complex and curvilinear geometries; (3) arbitrary orientation and placement of MEMS components; and (4) comprehensive, 3D visualization and analyses.

Citation Download Citation

Linh Nguyen, Hee Jung Lee, Mary Ann Perez-Maher, and Ying Xu "Structured CAD methodology for integrated MEMS and IC design", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); https://doi.org/10.1117/12.341209

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