Laser-induced two-dimensional submicron periodical structures on the high-reflectance surface

Vasily V. Valyavko; Vladimir P. Osipov

doi:10.1117/12.334834

28 December 1998 Laser-induced two-dimensional submicron periodical structures on the high-reflectance surface

Vasily V. Valyavko, Vladimir P. Osipov

Proceedings Volume 3684, Laser Optics '98: Nonlinear and Coherent Optics; (1998) https://doi.org/10.1117/12.334834
Event: Laser Optics '98, 1998, St. Petersburg, Russian Federation

Abstract

There are discovered physical aspects of one-pulse laser forming of 2D periodical surface microstructures with the characteristic sizes about 30 times less than the used laser radiation wavelength. It is experimentally shown that by means of TEA carbon dioxide laser treatment of the 800 A^o-aluminum film, evaporated on the K8-glass substrate, the periodical system of microhollows with the diameter about 0.5 micron can be formed. The proposed method may be useful for surface microstructures producing in microelectronics or precise filters fabrication.

Citation Download Citation

Vasily V. Valyavko and Vladimir P. Osipov "Laser-induced two-dimensional submicron periodical structures on the high-reflectance surface", Proc. SPIE 3684, Laser Optics '98: Nonlinear and Coherent Optics, (28 December 1998); https://doi.org/10.1117/12.334834

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