Emission of particles by solid-phase laser-induced destruction of silicon surface

Alexander F. Banishev; Vladimir S. Golubev; Alexei Yu. Kremnev

doi:10.1117/12.342360

15 March 1999 Emission of particles by solid-phase laser-induced destruction of silicon surface

Alexander F. Banishev, Vladimir S. Golubev, Alexei Yu. Kremnev

Proceedings Volume 3734, ICONO '98: Fundamental Aspects of Laser-Matter Interaction and New Nonlinear Optical Materials and Physics of Low-Dimensional Structures; (1999) https://doi.org/10.1117/12.342360
Event: ICONO '98: Laser Spectroscopy and Optical Diagnostics: Novel Trends and Applications in Laser Chemistry, Biophysics, and Biomedicine, 1998, Moscow, Russian Federation

Abstract

This paper presents the results of investigation into the process of silicon surface solid-phase destruction under YAG:Nd laser pulses. The glow was registrated that was due to emission of the heated particles from the sample surface, which can be caused by microexplosions and microcracking of the surface owing to great thermoelastic stresses in the interaction area.

Citation Download Citation

Alexander F. Banishev, Vladimir S. Golubev, and Alexei Yu. Kremnev "Emission of particles by solid-phase laser-induced destruction of silicon surface", Proc. SPIE 3734, ICONO '98: Fundamental Aspects of Laser-Matter Interaction and New Nonlinear Optical Materials and Physics of Low-Dimensional Structures, (15 March 1999); https://doi.org/10.1117/12.342360

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