Construction and design of a high-resolution portable scanning electron microscope column

Anjam Khursheed

doi:10.1117/12.370121

15 November 1999 Construction and design of a high-resolution portable scanning electron microscope column

Anjam Khursheed

Proceedings Volume 3777, Charged Particle Optics IV; (1999) https://doi.org/10.1117/12.370121
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

This paper presents Hall probe measurements on the recently proposed high resolution portable Scanning Electron Microscope (SEM) concept. A test column using permanent magnet lenses was constructed and has a height of 120 mm. Experimental axial flux density measurements were found to correlate well with simulation predictions. A method of varying the axial field strength by using magnetic shorting plates was investigated and found to be successful. In this way, the beam energy can be varied, and the portable permanent magnet column will be able to operate in a similar way to conventional SEMs.

Citation Download Citation

Anjam Khursheed "Construction and design of a high-resolution portable scanning electron microscope column", Proc. SPIE 3777, Charged Particle Optics IV, (15 November 1999); https://doi.org/10.1117/12.370121

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