Liquid crystal on VLSI silicon optical phased array

Jay E. Stockley; Darius Subacius; Steven A. Serati

doi:10.1117/12.351635

2 July 1999 Liquid crystal on VLSI silicon optical phased array

Jay E. Stockley, Darius Subacius, Steven A. Serati

Proceedings Volume 3787, Optical Scanning: Design and Application; (1999) https://doi.org/10.1117/12.351635
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

Currently VLSI foundries are pushing for small feature size and higher operating voltages. These ongoing developments in integrated circuit fabrication processes result in devices exhibiting excellent electrical performance, but poor optical quality. Increased reflectivity and planarization are necessary to produce high efficiency beam steering devices. Steps taken to improve optical performance of silicon backplanes will also be discussed.

Citation Download Citation

Jay E. Stockley, Darius Subacius, and Steven A. Serati "Liquid crystal on VLSI silicon optical phased array", Proc. SPIE 3787, Optical Scanning: Design and Application, (2 July 1999); https://doi.org/10.1117/12.351635

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