Preparation of oxinitride optical waveguides with piezoelectric modulation fabricated by silicon micromachining

Christophe Gorecki

doi:10.1117/12.364302

15 September 1999 Preparation of oxinitride optical waveguides with piezoelectric modulation fabricated by silicon micromachining

Christophe Gorecki

Author Affiliations +

Proceedings Volume 3825, Microsystems Metrology and Inspection; (1999) https://doi.org/10.1117/12.364302
Event: Industrial Lasers and Inspection (EUROPTO Series), 1999, Munich, Germany

Abstract

This paper presents the design and the fabrication steps of a novel integrated Mach-Zehnder interferometer with a phase modulation. A well-controlled Si machining as well as ZnO thin-film transducer integration on the same Silicon substrate permits to transform an optically passive device to an active device with sinusoidal phase modulation of 1.3 rad.

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Christophe Gorecki "Preparation of oxinitride optical waveguides with piezoelectric modulation fabricated by silicon micromachining", Proc. SPIE 3825, Microsystems Metrology and Inspection, (15 September 1999); https://doi.org/10.1117/12.364302

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