Detection of volatile organics using a surface acoustic-wave array system

Richard W. Cernosek; W G. Yelton; C. W. Colburn; Larry F. Anderson; A. W. Staton; Gordon C. Osbourn; John W. Bartholomew; R. F. Martinez; Antonio J. Ricco; Richard M. Crooks

doi:10.1117/12.370282

18 November 1999 Detection of volatile organics using a surface acoustic-wave array system

Richard W. Cernosek, W G. Yelton, C. W. Colburn, Larry F. Anderson, A. W. Staton, Gordon C. Osbourn, John W. Bartholomew, R. F. Martinez, Antonio J. Ricco, Richard M. Crooks

Author Affiliations +

Proceedings Volume 3857, Chemical Microsensors and Applications II; (1999) https://doi.org/10.1117/12.370282
Event: Photonics East '99, 1999, Boston, MA, United States

Abstract

A chemical sensor system based on arrays of surface acoustic wave (SAW) delay lines has been developed for identification and quantification of volatile organic compounds. The individual SAW chemical sensors consist of interdigital transducers patterned on the surface of an ST-cut quartz substrate to launch and detect the acoustic waves and a thin film coating in the SAW propagation path to perturb the acoustic wave velocity and attenuation during analyte sorption.

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Richard W. Cernosek, W G. Yelton, C. W. Colburn, Larry F. Anderson, A. W. Staton, Gordon C. Osbourn, John W. Bartholomew, R. F. Martinez, Antonio J. Ricco, and Richard M. Crooks "Detection of volatile organics using a surface acoustic-wave array system", Proc. SPIE 3857, Chemical Microsensors and Applications II, (18 November 1999); https://doi.org/10.1117/12.370282

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