Addressable microslit-array devices for miniaturized systems

Thomas Seifert; Rainer Riesenberg; Peter Buecker; Thomas Martin; Bernt Goetz

doi:10.1117/12.361257

2 September 1999 Addressable microslit-array devices for miniaturized systems

Thomas Seifert, Rainer Riesenberg, Peter Buecker, Thomas Martin, Bernt Goetz

Proceedings Volume 3878, Miniaturized Systems with Micro-Optics and MEMS; (1999) https://doi.org/10.1117/12.361257
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States

Abstract

Micro-optical slits and apertures are essential components of optical systems. As new devices addressable micro slit arrays are presented. These arrays act as spatial light modulator, scanner or optical shutter. It is discussed the microfabrication of chips with slits, new arrangements of actuators to address the slit as well as addressable micro slit array concepts. The microfabrication of chips is based on silicon membranes. By bulk micromachining technology very stable membranes of a thickness of 1.5 ... 2 micrometer are prepared. The dimensions of the slits are width 3 micrometer ... 1 mm, height up to 2 mm. They are prepared on a membrane area up to 1000 mm². So it is possible to prepare a lot of slits, a slit array have up to 150 apertures. The slits are addressable by a linear shift of a piezoactuator. Concepts, features and limits of newly developed miniaturized piezoactuator devices with solid state links for slit-chips are given. The position can be controlled by an integrated path measurement system. Addressable architectures are made by two membrane and one membrane arrangements. An advantage is the very limited stray light compared with micromirror arrays and DMDs. The slit arrays are usable in the full spectral region. The development of the presented micro electro mechanical device is driven by the commercial applications of high performance spectral instruments. Features of the presented device are for example the spectral resolution advantage (up to the factor of 7) and the throughput advantage (up to the factor of 10) for the instrument.

Citation Download Citation

Thomas Seifert, Rainer Riesenberg, Peter Buecker, Thomas Martin, and Bernt Goetz "Addressable microslit-array devices for miniaturized systems", Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, (2 September 1999); https://doi.org/10.1117/12.361257

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