X-ray generation using Ar, Kr and Xe cryogenic targets is investigated and compared. Strong x-ray emission at (lambda) equals 3.2 nm from Ar, (lambda) equals 9.0 and 10.0 nm from Kr and (lambda) equals 10.8 nm from Xe are observed. The x-ray conversion efficiencies of Ar, Kr and Xe cryogenic targets were 0.4 percent/sr/10 percent bw at IL equals 1 X 1012W/cm2, respectively, and were proportional to about 0.16, 0.07 and 0.3 power to the laser intensity, respectively. From gas cell target experiments, it is found that the initial target density is required to exceed 1021 cm-3. In cryogenic mixture targets the x- ray conversion efficiency per Xe mole fraction is found to have maximum values at a specific value of Xe fraction. Finally a high average power x-ray generation is demonstrated using a device of continuous supply of the target and a high average power high rep rate Q-switched YAG slab laser driver that we developed.
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