Design and performance evaluation of a silicon eye using micromirrors

Natalie Clark; Paul Furth

doi:10.1117/12.368437

8 October 1999 Design and performance evaluation of a silicon eye using micromirrors

Natalie Clark, Paul Furth

Proceedings Volume 3893, Design, Characterization, and Packaging for MEMS and Microelectronics; (1999) https://doi.org/10.1117/12.368437
Event: Asia Pacific Symposium on Microelectronics and MEMS, 1999, Gold Coast, Australia

Abstract

We have developed a new paradigm, based on massively parallel analog processing coupled with a MEMS micromirror device, for developing intelligent vision systems that is capable of performing adaptive optics at rates exceeding 1 kHz and 3D imaging at bandwidths exceeding 100 Hz. The design and modeling methodologies associated with our smart vision chip are presented along with experimental results that characterize its performance. We also present design and modeling methodologies of our micromirror devices along with experimental result that characterize their performance in typical adaptive optic systems. Finally, we present modeling and simulation methodologies of adaptive optics systems along with experimental results used to design and test an adaptive optic system. The design and modeling methodologies that are presented lend themselves to facilitating the design and development of a wide variety other sophisticated vision systems. In addition to speed, our approach offers advantages in low cost batch fabrication, compact size, low power consumption, and radiation tolerance, making it ideal for many applications.

Citation Download Citation

Natalie Clark and Paul Furth "Design and performance evaluation of a silicon eye using micromirrors", Proc. SPIE 3893, Design, Characterization, and Packaging for MEMS and Microelectronics, (8 October 1999); https://doi.org/10.1117/12.368437

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