Toward high-torque electrostatic tubular motors

Philippe Helin; Gilles Bourbon; Patrice Minotti; Hiroyuki Fujita

doi:10.1117/12.368443

8 October 1999 Toward high-torque electrostatic tubular motors

Philippe Helin, Gilles Bourbon, Patrice Minotti, Hiroyuki Fujita

Author Affiliations +

Proceedings Volume 3893, Design, Characterization, and Packaging for MEMS and Microelectronics; (1999) https://doi.org/10.1117/12.368443
Event: Asia Pacific Symposium on Microelectronics and MEMS, 1999, Gold Coast, Australia

Abstract

A new generation of electrostatic micro-motors is investigated using cooperation of arrayed direct-drive actuators. Electrostatic scratch-drive actuators (SDA), which combine active frictional contact mechanisms with electrostatic actuation, are particularly analyzed. Active polysilicon sheets of 2*3 mm² that integrate up to several thousands of electrostatic scratch drive actuators are fabricated by silicon surface micro-machining process. Each elementary actuator provides its contribution according to the driving force superposition principle, with internal forces as high as 10⁵uN are available from this sheet. According to their natural flexibility, active polysilicon sheets can be coated onto large surfaces. A new generation of self-assembled tubular electrostatic micromotors is developed using this concept. A prototype of a cylindrical micromotor, whose external diameter and length are 1 mm and 2 mm, respectively, has been realized through the insertion of a flexible active polysilicon sheet at the rotor/motor- frame interface. After final assembling, the sheet has to be jammed onto the chassis, in order to allow the rotor to be moved with respect to the motor frame. Thus, the sheet must be in close contact with both the rotor and the motor frame, whatever the gap, which separates the two macroscopic parts. The problem related to the micro/macro world interfacing is solved during the design of sheet in allowing an out-of- plane motion of SDA in order to provide a self gap compensation, whatever both the thermal expansion effects and the macroscopic machining tolerances. The expected driving characteristics show the interest of both cooperative arrayed microactuators and direct drive frictional mechanisms.

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Philippe Helin, Gilles Bourbon, Patrice Minotti, and Hiroyuki Fujita "Toward high-torque electrostatic tubular motors", Proc. SPIE 3893, Design, Characterization, and Packaging for MEMS and Microelectronics, (8 October 1999); https://doi.org/10.1117/12.368443

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KEYWORDS

Actuators

Silicon

Superposition

Microactuators

Thermal effects

Prototyping

Tolerancing

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