Testing method for microprofile of optical supersmooth surface

Jianbai Li; Shaorong Xiao; Xiaoyun Li; Aihan Ying; Xiaoli Zhang; Anging Zhuo

doi:10.1117/12.369333

11 November 1999 Testing method for microprofile of optical supersmooth surface

Jianbai Li, Shaorong Xiao, Xiaoyun Li, Aihan Ying, Xiaoli Zhang, Anging Zhuo

Proceedings Volume 3897, Advanced Photonic Sensors and Applications; (1999) https://doi.org/10.1117/12.369333
Event: International Symposium on Photonics and Applications, 1999, Singapore, Singapore

Abstract

In this paper, some advantage on testing method for optical supersmooth surface using Atomic Force Microscope (AFM) are presented, and compared with classical interference method. Important applications of AFM for optical technique are introduced in the paper. Some testing results on microprofile and roughness of optical supersmooth surface using AFM method are listed, and it has indicated that result is not obtained with interference method.

Citation Download Citation

Jianbai Li, Shaorong Xiao, Xiaoyun Li, Aihan Ying, Xiaoli Zhang, and Anging Zhuo "Testing method for microprofile of optical supersmooth surface", Proc. SPIE 3897, Advanced Photonic Sensors and Applications, (11 November 1999); https://doi.org/10.1117/12.369333

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