Aluminum-hollow fiber delivery system for excimer lasers

Yuji Matsuura; Takashi Yamamoto; Mitsunobu Miyagi

doi:10.1117/12.384916

3 May 2000 Aluminum-hollow fiber delivery system for excimer lasers

Yuji Matsuura, Takashi Yamamoto, Mitsunobu Miyagi

Proceedings Volume 3911, Biomedical Diagnostic, Guidance, and Surgical-Assist Systems II; (2000) https://doi.org/10.1117/12.384916
Event: BiOS 2000 The International Symposium on Biomedical Optics, 2000, San Jose, CA, United States

Abstract

Hollow fibers for transmitting high-power ArF-excimer laser light are fabricated by Metal Organic Chemical Vapor Deposition method. The hollow fibers with the inner diameter of 1 mm are fabricated by depositing an aluminum film on the inside of silica glass capillary by employing dimethylethylamine alane as the precursor. The fibers shows low-loss property, high durability, and high-energy threshold with the radiation of excimer lasers.

Citation Download Citation

Yuji Matsuura, Takashi Yamamoto, and Mitsunobu Miyagi "Aluminum-hollow fiber delivery system for excimer lasers", Proc. SPIE 3911, Biomedical Diagnostic, Guidance, and Surgical-Assist Systems II, (3 May 2000); https://doi.org/10.1117/12.384916

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