High-throughput optimizations of alloy and doped films based on ZnO and parallel synthesis of ZnO/MgxZN1-xO quantum wells using combinatorial laser MBE toward ultraviolet laser

Akira Ohtomo; Takayuki Makino; Kentaro Tamura; Yuji Matsumoto; Yusaburo Segawa; ZiKang Tang; George K.L. Wong; Hideomi Koinuma; Masashi Kawasaki

doi:10.1117/12.385415

17 May 2000 High-throughput optimizations of alloy and doped films based on ZnO and parallel synthesis of ZnO/Mg_xZN_1-xO quantum wells using combinatorial laser MBE toward ultraviolet laser

Akira Ohtomo, Takayuki Makino, Kentaro Tamura, Yuji Matsumoto, Yusaburo Segawa, ZiKang Tang, George K.L. Wong, Hideomi Koinuma, Masashi Kawasaki

Author Affiliations +

Proceedings Volume 3941, Combinatorial and Composition Spread Techniques in Materials and Device Development; (2000) https://doi.org/10.1117/12.385415
Event: Symposium on Integrated Optoelectronics, 2000, San Jose, CA, United States

Abstract

We report high-throughput optimizations for various material parameters of Mg,Zn_1-xO and Zn_1-xCd_xO alloy films, Al-doped ZnO films, Mg_xZn_1-xO/ZnO single quantum wells and superlattice structures with using combinatorial laser MBE. Combinatorial chips including nine thin film pixels were grown on lattice-matched ScAlMgO₄ (0001) substrates by switching the mask patterns and targets during pulsed laser deposition.

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Akira Ohtomo, Takayuki Makino, Kentaro Tamura, Yuji Matsumoto, Yusaburo Segawa, ZiKang Tang, George K.L. Wong, Hideomi Koinuma, and Masashi Kawasaki "High-throughput optimizations of alloy and doped films based on ZnO and parallel synthesis of ZnO/Mg_xZN_1-xO quantum wells using combinatorial laser MBE toward ultraviolet laser", Proc. SPIE 3941, Combinatorial and Composition Spread Techniques in Materials and Device Development, (17 May 2000); https://doi.org/10.1117/12.385415

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