Measurements of the subpixel sensitivity for a backside-illuminated CCD

Albert Piterman; Zoran Ninkov

doi:10.1117/12.385467

15 May 2000 Measurements of the subpixel sensitivity for a backside-illuminated CCD

Albert Piterman, Zoran Ninkov

Proceedings Volume 3965, Sensors and Camera Systems for Scientific, Industrial, and Digital Photography Applications; (2000) https://doi.org/10.1117/12.385467
Event: Electronic Imaging, 2000, San Jose, CA, United States

Abstract

This paper presents results from a measurement program designed to investigate the variations in sensitivity of focal plane arrays on a sub-pixel scale. High-resolution measurements have previously been reported for a front- illuminated CCD device. New measurements are now provided on the sensitivity variations with in a single pixel of a backside-illuminated CCD. The measurements were made using a stable broadband light source and two high-precision translation stages. The pixel scans have been performed using 4 different filters (3 broadband and 1 narrowband). The results for each spectral region are presented.19

Citation Download Citation

Albert Piterman and Zoran Ninkov "Measurements of the subpixel sensitivity for a backside-illuminated CCD", Proc. SPIE 3965, Sensors and Camera Systems for Scientific, Industrial, and Digital Photography Applications, (15 May 2000); https://doi.org/10.1117/12.385467

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