Diagnostic technique of gas jet for debris-free laser plasma EUV source

Sergei V. Bobashev; Rene de Bruijn; Tatyana G. Kopytova; Yurii A. Kurakin; Alexander A. Schmidt; Zinaida A. Stepanova; Gennadii K. Tumakaev

doi:10.1117/12.390118

21 July 2000 Diagnostic technique of gas jet for debris-free laser plasma EUV source

Sergei V. Bobashev, Rene de Bruijn, Tatyana G. Kopytova, Yurii A. Kurakin, Alexander A. Schmidt, Zinaida A. Stepanova, Gennadii K. Tumakaev

Author Affiliations +

Proceedings Volume 3997, Emerging Lithographic Technologies IV; (2000) https://doi.org/10.1117/12.390118
Event: Microlithography 2000, 2000, Santa Clara, CA, United States

Abstract

Gas target parameters are determined both experimentally and by numerical simulation. A new experimental setup was built to produce a supersonic gas jet to implant schlieren photography to investigate the gas jet. A numerical study was also performed to estimate parameters of the jets and effects of nozzle shapes, pressure ratio as well as working and ambient gas parameters. Effect of homogeneous nucleation and micro- droplets formation in the expanding jet was taking into account. The developed approach demonstrates good efficiency, flexibility and accuracy. It enables one to consider nozzle starting processes with shocked flows characterized by complicated structure and phase transfer processes. Jet structure and parameters (density, velocity and temperature fields) were determined as well as fraction of condensed matter and micro-drop parameters.

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Sergei V. Bobashev, Rene de Bruijn, Tatyana G. Kopytova, Yurii A. Kurakin, Alexander A. Schmidt, Zinaida A. Stepanova, and Gennadii K. Tumakaev "Diagnostic technique of gas jet for debris-free laser plasma EUV source", Proc. SPIE 3997, Emerging Lithographic Technologies IV, (21 July 2000); https://doi.org/10.1117/12.390118

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