Comparison of ANOVA and Latin square measurement system analysis techniques

John A. Allgair

doi:10.1117/12.386540

2 June 2000 Comparison of ANOVA and Latin square measurement system analysis techniques

John A. Allgair

Author Affiliations +

Proceedings Volume 3998, Metrology, Inspection, and Process Control for Microlithography XIV; (2000) https://doi.org/10.1117/12.386540
Event: Microlithography 2000, 2000, Santa Clara, CA, United States

Abstract

Measurement system analysis is essential for determining the quality of data used for process control. Analysis of variation, or ANOVA, is a commonly used technique for measurement system analysis. Recently, the Advanced Metrology Advisory Group at SEMATECH has proposed using the Latin Square technique for determining the reproducibility and repeatability of a CD SEM. Advantages and disadvantages of the two techniques will be discussed.

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John A. Allgair "Comparison of ANOVA and Latin square measurement system analysis techniques", Proc. SPIE 3998, Metrology, Inspection, and Process Control for Microlithography XIV, (2 June 2000); https://doi.org/10.1117/12.386540

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