X-ray scanner: a new device for rapid mapping of nanometer-scale roughness

Vladimir V. Protopopov; Kamil A. Valiev; Rafik M. Imamov

doi:10.1117/12.397955

31 August 2000 X-ray scanner: a new device for rapid mapping of nanometer-scale roughness

Vladimir V. Protopopov, Kamil A. Valiev, Rafik M. Imamov

Proceedings Volume 4076, Optical Diagnostics for Industrial Applications; (2000) https://doi.org/10.1117/12.397955
Event: Symposium on Applied Photonics, 2000, Glasgow, United Kingdom

Abstract

A new device for rapid non-contact characterization of roughness spatial distribution of flat surfaces is developed. Its operational principle is based on the strong dependence on roughness of the intensity of x-rays reflected from a superpolished surface. This effect may be used to obtain a two-dimensional map of the roughness spatial distribution for flat surface with a rms. roughness height of the order of one nanometre. The key components of this device are a precision mechanical one- dimensional scanning stage, a parabolic collimator with vacuum beam path, and a temperature stabilized cooled x-ray linear detector array.

Citation Download Citation

Vladimir V. Protopopov, Kamil A. Valiev, and Rafik M. Imamov "X-ray scanner: a new device for rapid mapping of nanometer-scale roughness", Proc. SPIE 4076, Optical Diagnostics for Industrial Applications, (31 August 2000); https://doi.org/10.1117/12.397955

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