Gratings in resonant multilayer structures

Ludovic Escoubas; Francois Flory; F. Lemarchand; Laurent Roux; Gerard Albrand

doi:10.1117/12.408468

29 November 2000 Gratings in resonant multilayer structures

Ludovic Escoubas, Francois Flory, F. Lemarchand, Laurent Roux, Gerard Albrand

Proceedings Volume 4086, Fourth International Conference on Thin Film Physics and Applications; (2000) https://doi.org/10.1117/12.408468
Event: 4th International Conference on Thin Film Physics and Applications, 2000, Shanghai, China

Abstract

Enhancement of the free-space diffraction efficiency of titanium-ion implanted gratings by inserting them into multilayer dielectric Fabry-Perot cavities has been demonstrated theoretically in previous works. In this paper, we discuss the sensitivity of the diffraction efficiency to the optogeometrical parameters of the structures obtained using titanium-ion implantation. A process to perform a phase grating in a seven-layer mirror Fabry-Perot cavity is described and experimental results pertaining to efficiency measurements on this structure are compared to numerical simulations.

Citation Download Citation

Ludovic Escoubas, Francois Flory, F. Lemarchand, Laurent Roux, and Gerard Albrand "Gratings in resonant multilayer structures", Proc. SPIE 4086, Fourth International Conference on Thin Film Physics and Applications, (29 November 2000); https://doi.org/10.1117/12.408468

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