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18 August 2000 Design and fabrication of a GXGA microdisplay chip
Paul M. F. Colson, Freddy De Pestel, Marnix Tack, Gust Schols, Herbert De Smet, Jean Van den Steen, Andre Van Calster
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Proceedings Volume 4181, Challenges in Process Integration and Device Technology; (2000) https://doi.org/10.1117/12.395745
Event: Microelectronic Manufacturing, 2000, Santa Clara, CA, United States
Abstract
Microdisplay-based imaging system are quickly becoming very important. A light valve based on a GXGA microdisplay with 5 megapixels is targeted. The pixel pitch is 15 micrometers , leading to an active display area of 38.4 by 30.72 mm. Both the design and the fabrication of such a large die have presented several challenges. This paper describes the design of reticles for GXGA resolution with on-chip drivers. The chip size associated with this resolution e4xceeds the available reticle size. Stitching is used for the processing of large x-Si backplanes. The reticle set is also suitable for GXGA and XGAp resolutions with drivers. The front-end layers are implemented in a standard double metal 0.7micrometers CMOS technology extended with minimal adaptations. The back-end comprises advanced sub-halfmicron processing steps: two metallization layers with a 500nm-feature size for the light shielding function resp. mirroring function.
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Paul M. F. Colson, Freddy De Pestel, Marnix Tack, Gust Schols, Herbert De Smet, Jean Van den Steen, and Andre Van Calster "Design and fabrication of a GXGA microdisplay chip", Proc. SPIE 4181, Challenges in Process Integration and Device Technology, (18 August 2000); https://doi.org/10.1117/12.395745
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KEYWORDS
Reticles
CMOS technology
Imaging systems
Light valves
Metals
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