Electron-optical properties of electrostatic immersion objective

O. D. Potapkin

doi:10.1117/12.394157

2 August 2000 Electron-optical properties of electrostatic immersion objective

O. D. Potapkin

Proceedings Volume 4187, Fourth All-Russian Seminar on Problems of Theoretical and Applied Electron Optics; (2000) https://doi.org/10.1117/12.394157
Event: Fourth All-Russian Seminar on Problems of Theoretical and Applied Electron Optics, 1999, Moscow, Russian Federation

Abstract

Long focus eletrostatic objective of simplest geometry with plane cathode has been investigated. Main feature of the immersion objective is telescopic mode and its linear magnification is almost constant in wide range of electrode potential changing. The spherical and chromatical aberration dependence on electrodes potential was studing. The results can be useful for optimization of geometrical size of low- voltage immersion objectives and for quick evaluation of electron optical properties of immersion lens.

Citation Download Citation

O. D. Potapkin "Electron-optical properties of electrostatic immersion objective", Proc. SPIE 4187, Fourth All-Russian Seminar on Problems of Theoretical and Applied Electron Optics, (2 August 2000); https://doi.org/10.1117/12.394157

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