Paper
11 October 2000 Three-dimensional position control of a parallel micromanipulator using visual servoing
Pasi Kallio, Quan Zhou, Juha Korpinen, Heikki N. Koivo
Author Affiliations +
Proceedings Volume 4194, Microrobotics and Microassembly II; (2000) https://doi.org/10.1117/12.403690
Event: Intelligent Systems and Smart Manufacturing, 2000, Boston, MA, United States
Abstract
This paper presents a computer-vision based position controller for a highly non-linear parallel piezohydraulic micromanipulator: in addition to its non-linear kinematics the micromanipulator experiences hysteresis and drive induced by piezoelectric actuators. The controller consists of a decoupling matrix that provides the decoupled translations (xyz) in the task frame and three Single Input Single Output (SISO) PI controllers for the translations. Position measurement is performed by a vision system that determines the x and y coordinates of the end- effector using a modified Hierarchical Chamfer Matching Algoritm (HCMA) and the z position using a depth-from-defocus method. Experiments show that the proposed controller is capable of serving the parallel micromanipulator with a sub-micron accuracy at a sampling rate of 18 Hz.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Pasi Kallio, Quan Zhou, Juha Korpinen, and Heikki N. Koivo "Three-dimensional position control of a parallel micromanipulator using visual servoing", Proc. SPIE 4194, Microrobotics and Microassembly II, (11 October 2000); https://doi.org/10.1117/12.403690
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Cited by 20 scholarly publications.
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KEYWORDS
Actuators

Visualization

Control systems

Feedback control

Kinematics

Microsystems

Sensors

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