New models for optical MEMS

Timothy P. Kurzweg; Jose A. Martinez; Steven Peter Levitan; Philippe J. Marchand; Donald M. Chiarulli

doi:10.1117/12.417353

6 March 2001 New models for optical MEMS

Timothy P. Kurzweg, Jose A. Martinez, Steven Peter Levitan, Philippe J. Marchand, Donald M. Chiarulli

Proceedings Volume 4198, Optomechanical Engineering 2000; (2001) https://doi.org/10.1117/12.417353
Event: Intelligent Systems and Smart Manufacturing, 2000, Boston, MA, United States

Abstract

Computer Aided Design (CAD) tools for modeling optical MEM systems must not only model three distinct domains (optical, electrical, and mechanical), these tools must also model the interactions between the signals of these domains. We strive to create system-level models that are applicable for an optical MEM CAD tool using techniques that support accurate results and interactive computation times. This paper discusses our modeling efforts for multi-domain optical MEM systems with the implementation of these models into our CAD framework, Chatoyant. As an example of our mixed-modeling research, we present the simulation and analysis of a 2 X 2 optical cross connect using Chatoyant. The simulations include the dynamic response of a mechanical beam, diffractive optical effects, and the interaction between these domains.

Citation Download Citation

Timothy P. Kurzweg, Jose A. Martinez, Steven Peter Levitan, Philippe J. Marchand, and Donald M. Chiarulli "New models for optical MEMS", Proc. SPIE 4198, Optomechanical Engineering 2000, (6 March 2001); https://doi.org/10.1117/12.417353

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