Optoelectronic inspection method for IC shell blanks

Changku Sun; Hongyan Shi; Xiaojie Xue; Shenghua Ye

doi:10.1117/12.403843

10 October 2000 Optoelectronic inspection method for IC shell blanks

Changku Sun, Hongyan Shi, Xiaojie Xue, Shenghua Ye

Proceedings Volume 4222, Process Control and Inspection for Industry; (2000) https://doi.org/10.1117/12.403843
Event: Optics and Optoelectronic Inspection and Control: Techniques, Applications, and Instruments, 2000, Beijing, China

Abstract

This paper propounds an optoelectronic self-study inspection method for IC' shell blanks on the basis of comparison with standardized workpieces. First, the inspection system self- studies. Second, the system automatically inspects the products, and those exceeding the acceptance tolerance will be singled out as the unqualified. By comparing the inspected workpieces with the standard ones the system can identify defects such as shutdown and cutting-out. This method is of high inspection speed, powerful anti-interference ability, and high flexibility in term of shape variety.

Citation Download Citation

Changku Sun, Hongyan Shi, Xiaojie Xue, and Shenghua Ye "Optoelectronic inspection method for IC shell blanks", Proc. SPIE 4222, Process Control and Inspection for Industry, (10 October 2000); https://doi.org/10.1117/12.403843

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available