Grating angular displacement transducer using a Fabry-Perot structure and its performance improvement

Zhiquan Li; Xifu Qiang; Zhaoxia Wu; Chunling Fan

doi:10.1117/12.401775

5 October 2000 Grating angular displacement transducer using a Fabry-Perot structure and its performance improvement

Zhiquan Li, Xifu Qiang, Zhaoxia Wu, Chunling Fan

Proceedings Volume 4223, Instruments for Optics and Optoelectronic Inspection and Control; (2000) https://doi.org/10.1117/12.401775
Event: Optics and Optoelectronic Inspection and Control: Techniques, Applications, and Instruments, 2000, Beijing, China

Abstract

The Fabry-Perot interferometer (FPI) has been traditionally used to examine either small spectral ranges or relatively simple spectra. Recently, however, the studies have shown that the FPI can be competitive with the Michelson interferometer over extended spectral ranges. A relatively new FPI is described based on two gratings. In order to measure angular micro-displacement, a novel grating angular displacement transducer using a multiplex Fabry-Perot interference technology has been developed in this paper.

Citation Download Citation

Zhiquan Li, Xifu Qiang, Zhaoxia Wu, and Chunling Fan "Grating angular displacement transducer using a Fabry-Perot structure and its performance improvement", Proc. SPIE 4223, Instruments for Optics and Optoelectronic Inspection and Control, (5 October 2000); https://doi.org/10.1117/12.401775

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