Development and traceability of a multifunctional microscope

Wen-Jong Chen; Chih-Kung Lee; Shui-Shong Lua; Yu-Jena Chang; Yu-Chiaa Chang; Chi-Yuana Chang; Shuen-Chen Shiue; Shu-Sheng Lee; Huay-Chung Liou

doi:10.1117/12.445622

22 October 2001 Development and traceability of a multifunctional microscope

Wen-Jong Chen, Chih-Kung Lee, Shui-Shong Lua, Yu-Jena Chang, Yu-Chiaa Chang, Chi-Yuana Chang, Shuen-Chen Shiue, Shu-Sheng Lee, Huay-Chung Liou

Author Affiliations +

Proceedings Volume 4401, Recent Developments in Traceable Dimensional Measurements; (2001) https://doi.org/10.1117/12.445622
Event: Lasers in Metrology and Art Conservation, 2001, Munich, Germany

Abstract

A multi-functional microscope named Morphininscope, which was designed to switch between various measurement functions by simply rotating its turret or turning on some sub-systems, was presented. Some of the various built-in functions of this microscope, including a confocal microscope, a photon-tunneling microscope, a laser based phase-shifting interferometry microscope, a Linnik interference microscope, and an ellipsometer, etc. are examined. The opportunity to bring traceability to thin-film or nano-materials metrology, which is an issue under extensive investigations now, offered by the multi-functional microscope were also detailed. Design thinking, optical and opto-mechanical configurations adopted, and experimental results of this newly multi-functional microscope were examined. Measurement of a grating surface, the real and the imaginary complex refractive indices, and the corrected surface profile of an inhomogeneous specimen were used to demonstrate the performance and advantages of this type of multi-functional microscope. Potential to achieve and transfer traceability of the primary standard in Morphinscope was also discussed.

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Wen-Jong Chen, Chih-Kung Lee, Shui-Shong Lua, Yu-Jena Chang, Yu-Chiaa Chang, Chi-Yuana Chang, Shuen-Chen Shiue, Shu-Sheng Lee, and Huay-Chung Liou "Development and traceability of a multifunctional microscope", Proc. SPIE 4401, Recent Developments in Traceable Dimensional Measurements, (22 October 2001); https://doi.org/10.1117/12.445622

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KEYWORDS

Microscopes

Confocal microscopy

Photonic microstructures

Metrology

Calibration

Reflection

Optical microscopes

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