Concepts, characterization, and modeling of MEMS microswitches with gold contacts in MUMPs

Xavier Lafontan; Christian Dufaza; Michel Robert; Francis Pressecq; Guy Perez

doi:10.1117/12.425354

5 April 2001 Concepts, characterization, and modeling of MEMS microswitches with gold contacts in MUMPs

Xavier Lafontan, Christian Dufaza, Michel Robert, Francis Pressecq, Guy Perez

Proceedings Volume 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001; (2001) https://doi.org/10.1117/12.425354
Event: Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, 2001, Cannes-Mandelieu, France

Abstract

This paper demonstrates that RF MEMS micro-switches can be realized with a low cost MEMS technology such as MUMPs. Two different switches are proposed, namely the hinged beam switch and the gold overflowing switch. Their concepts, design and characterization are described in details. On-resistance as low as 5 - 6 (Omega) for the gold overflowing switch and 2 - 3 (Omega) for the hinged beam switch have been measured. Finally, experimental measurements showed that force and electrical current had strong influences on the overall electrical contact.

Citation Download Citation

Xavier Lafontan, Christian Dufaza, Michel Robert, Francis Pressecq, and Guy Perez "Concepts, characterization, and modeling of MEMS microswitches with gold contacts in MUMPs", Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); https://doi.org/10.1117/12.425354

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