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5 April 2001 Micromachined rf switches (Abstract Only)
Ci Moo Song
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Proceedings Volume 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001; (2001) https://doi.org/10.1117/12.425336
Event: Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, 2001, Cannes-Mandelieu, France
Abstract
A micromachined and hermetically packaged rf switch with excellent performances and high reliability will be presented. Test results, future challenges for commercialization and possible applications will be addressed.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
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Ci Moo Song "Micromachined rf switches (Abstract Only)", Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); https://doi.org/10.1117/12.425336
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KEYWORDS
Switches
Reliability
Packaging
Rutherfordium
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