Stiction-controlled locking system for three-dimensional self-assembled microstructures: theory and experimental validation

Vincent Agache; Lionel Buchaillot; Emmanuel Quevy; Dominique Collard

doi:10.1117/12.425345

5 April 2001 Stiction-controlled locking system for three-dimensional self-assembled microstructures: theory and experimental validation

Vincent Agache, Lionel Buchaillot, Emmanuel Quevy, Dominique Collard

Author Affiliations +

Proceedings Volume 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001; (2001) https://doi.org/10.1117/12.425345
Event: Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, 2001, Cannes-Mandelieu, France

Abstract

The novelty of our study lies in the first controlled use of the phenomenon of stiction to lock three-dimensional self- assembled polysilicon microstructures. The stiction refers to the permanent adhesion of the microstructures to adjacent surfaces. It can occur either during the final stage of the micromachining process, that is to say the releasing of the microstructural material, or after the packaging of the device, due to overrange input signals or electromechanical instability. As a result, we often regard stiction as a major failure issue in the MEMS field of research. This paper reports both the theory of our stiction-controlled locking system operation mode and the validation of our original concept through the stiction-locking of a 3-D self-assembled device.

Citation Download Citation

Vincent Agache, Lionel Buchaillot, Emmanuel Quevy, and Dominique Collard "Stiction-controlled locking system for three-dimensional self-assembled microstructures: theory and experimental validation", Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); https://doi.org/10.1117/12.425345

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