Pulsed laser deposition of nanocrystalline ZnSe:N thin films

Ning Xu; Yuancheng Du; Fuming Li; Bong Hyung Boo

doi:10.1117/12.456846

25 February 2002 Pulsed laser deposition of nanocrystalline ZnSe:N thin films

Ning Xu, Yuancheng Du, Fuming Li, Bong Hyung Boo

Proceedings Volume 4426, Second International Symposium on Laser Precision Microfabrication; (2002) https://doi.org/10.1117/12.456846
Event: Second International Symposium on Laser Precision Micromachining, 2001, Singapore, Singapore

Abstract

We have grown nanocrystalline ZnSe thin films on GaAs(200) substrates by pulsed laser deposition (PLD) using KrF excimer laser. Atomic force microscopy (AFM) shows that the ZnSe thin films grown on GaAs(100) at 10 torr are flat and dense and composed of crystallites with particle size of less than 100nm. X-ray diffraction (XRD) results indicated that this ZnSe thin film are of (100) crystalline orientation and the average size of crystallites is about 25nm. X-ray photoelectron spectroscopy (XPS) indicates that the as-deposited thin films contain 7%[N] and below 3% [O], and nitrogen with N-Zn, N-N or N-O bondings are respectively 55% and 45% of total contained nitrogen. Photoluminescence measurements show an donor-to acceptor pair (DAP) recombination emission with a blue shift with respect to bulk ZnSe, which reveals the activation of [N] atoms as shallow acceptors in nanocrystalline ZnSe.

Citation Download Citation

Ning Xu, Yuancheng Du, Fuming Li, and Bong Hyung Boo "Pulsed laser deposition of nanocrystalline ZnSe:N thin films", Proc. SPIE 4426, Second International Symposium on Laser Precision Microfabrication, (25 February 2002); https://doi.org/10.1117/12.456846

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available