Fabrication of gray-scale masks and diffractive optical elements with LDW glass

Victor Pavlovich Korolkov; Anatoly I. Malyshev; Alexander G. Poleshchuk; Vadim V. Cherkashin; Hans J. Tiziani; Christof Pruss; Thomas Schoder; Johann Westhauser; Chuck Wu

doi:10.1117/12.448026

9 November 2001 Fabrication of gray-scale masks and diffractive optical elements with LDW glass

Victor Pavlovich Korolkov, Anatoly I. Malyshev, Alexander G. Poleshchuk, Vadim V. Cherkashin, Hans J. Tiziani, Christof Pruss, Thomas Schoder, Johann Westhauser, Chuck Wu

Author Affiliations +

Proceedings Volume 4440, Lithographic and Micromachining Techniques for Optical Component Fabrication; (2001) https://doi.org/10.1117/12.448026
Event: International Symposium on Optical Science and Technology, 2001, San Diego, CA, United States

Abstract

In the last years the application of gray-scale masks (GSM) for diffractive optics manufacturing attracts attention because of cost-effective possibility to produce a lot of diffractive elements on hard and heat-resistant thermally stable substrates. Direct laser writing of GSMs and fabrication of diffractive optical elements are effectively realized with application of LDW-glass (material for Laser Direct Write from CANYON MATERIALS, Inc). An important advantage of this material is the real-time change of transmittance in a single-step process without liquid development. It is shown that optimal transmittance range in which track width is not more than 1 micrometers is from 5-10% (transmittance of unexposed area) to 60-65% for LDW-glass type I having thinner colored layer. Power modulation and surroundings dependent peculiarities of direct laser writing on LDW-glass are discussed. Results of fabrication of diffractive optical elements using LDW-glass masks are presented. Among several types of LDW glasses studied the advantages of new GS-11 glass are elaborated. Application of GS-11 glass for GSMs allowed to fabricate blazed diffractive structures with backward slope width of 0.8 micrometers .

Citation Download Citation

Victor Pavlovich Korolkov, Anatoly I. Malyshev, Alexander G. Poleshchuk, Vadim V. Cherkashin, Hans J. Tiziani, Christof Pruss, Thomas Schoder, Johann Westhauser, and Chuck Wu "Fabrication of gray-scale masks and diffractive optical elements with LDW glass", Proc. SPIE 4440, Lithographic and Micromachining Techniques for Optical Component Fabrication, (9 November 2001); https://doi.org/10.1117/12.448026

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available