Effects of particle shape on particle identification and scatter predictions

Vladimir I. Ivakhnenko; John C. Stover; Craig A. Scheer; Yuri A. Eremin

doi:10.1117/12.450087

10 December 2001 Effects of particle shape on particle identification and scatter predictions

Vladimir I. Ivakhnenko, John C. Stover, Craig A. Scheer, Yuri A. Eremin

Proceedings Volume 4449, Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II; (2001) https://doi.org/10.1117/12.450087
Event: International Symposium on Optical Science and Technology, 2001, San Diego, CA, United States

Abstract

Laser particle scanners are traditionally calibrated with polystyrene latex spheres, and these spheres are used to create a sizing scale in light scatter equivalents. Particle scatter signals can vary strongly with particle materials, thus concealing the true particle size. As previously reported, particle material identification in a laser scanner will allow true sizing of spherical particles through the application of accurate scatter models. This paper reports extending that work to non-spherical particles through the use of modeling scatter from ellipsoidal particles.

Citation Download Citation

Vladimir I. Ivakhnenko, John C. Stover, Craig A. Scheer, and Yuri A. Eremin "Effects of particle shape on particle identification and scatter predictions", Proc. SPIE 4449, Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II, (10 December 2001); https://doi.org/10.1117/12.450087

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available