Application of automatic parallel fracturing system on hierarchical and large data structure

Eiji Tsujimoto; Takahiro Watanabe; Keitaro Katabuchi; Akihiro Nogami; Shuji Shibayama; Hirokazu Sambayashi; Shozo Takaku; Norihiko Takase

doi:10.1117/12.458351

11 March 2002 Application of automatic parallel fracturing system on hierarchical and large data structure

Eiji Tsujimoto, Takahiro Watanabe, Keitaro Katabuchi, Akihiro Nogami, Shuji Shibayama, Hirokazu Sambayashi, Shozo Takaku, Norihiko Takase

Author Affiliations +

Proceedings Volume 4562, 21st Annual BACUS Symposium on Photomask Technology; (2002) https://doi.org/10.1117/12.458351
Event: Photomask 2001, 2001, Monterey, CA, United States

Abstract

TO enable efficient transformation of layout data to Electron Beam lithography drawing data in production, we have developed an automatic parallel-processing fracturing system named Tribune. Tribune can effectively use both parallel and hierarchical processing together to maximize the fracturing performance to easily handle large amounts of layout data. Tribune is designed to effectively use both parallel and hierarchical methods with the aid of cell information known by layout designers. A new fracturing algorithm is employed which fractures patterns whose width is wider than specified critical dimensions to minimize the number of tiny geometries for the improvement of pattern fidelity.

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Eiji Tsujimoto, Takahiro Watanabe, Keitaro Katabuchi, Akihiro Nogami, Shuji Shibayama, Hirokazu Sambayashi, Shozo Takaku, and Norihiko Takase "Application of automatic parallel fracturing system on hierarchical and large data structure", Proc. SPIE 4562, 21st Annual BACUS Symposium on Photomask Technology, (11 March 2002); https://doi.org/10.1117/12.458351

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