Synthesis and characterization of monosized SnOx nanoparticles for gas sensing applications

Heinz Fissan; Marcus K. Kennedy; F. Einar Kruis

doi:10.1117/12.454609

19 November 2001 Synthesis and characterization of monosized SnO_x nanoparticles for gas sensing applications

Heinz Fissan, Marcus K. Kennedy, F. Einar Kruis

Proceedings Volume 4590, BioMEMS and Smart Nanostructures; (2001) https://doi.org/10.1117/12.454609
Event: International Symposium on Microelectronics and MEMS, 2001, Adelaide, Australia

Abstract

In this paper we present an evaporation-condensation route to produce single sized SnOx nanoparticles using a Differential Mobility Analyser (DMA). The nanostructure and size distribution of the particles were studied as a function of the evaporation and sintering temperature. Transmission Electron Microscope (TEM) micrographs were taken to study the morphology of the nanoparticles. X-ray diffraction (X-ray), Rutherford backscattering (RBS), Auger electron microscopy (AES) and electron diffraction measurements were used to study the structure and stoichiometry of the deposited material. After an annealing process at Tequals300 degree(s)C in synthetic air particle size dependent conductivity measurements of monosized 10nm, 20nm and 30nm particles, such as Sensitivity S and dynamic behavior of the thin films acting as a gas sensor, were done.

Citation Download Citation

Heinz Fissan, Marcus K. Kennedy, and F. Einar Kruis "Synthesis and characterization of monosized SnO_x nanoparticles for gas sensing applications", Proc. SPIE 4590, BioMEMS and Smart Nanostructures, (19 November 2001); https://doi.org/10.1117/12.454609

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