Atomic force microscope using a diamond tip: a tool for micro/nanomachining on single-crystal silicon surface

Qingliang Zhao; Tao Sun; Ying-Chun Liang; Shen Dong; Mingjun Chen

doi:10.1117/12.444691

15 October 2001 Atomic force microscope using a diamond tip: a tool for micro/nanomachining on single-crystal silicon surface

Qingliang Zhao, Tao Sun, Ying-Chun Liang, Shen Dong, Mingjun Chen

Author Affiliations +

Proceedings Volume 4601, Micromachining and Microfabrication Process Technology and Devices; (2001) https://doi.org/10.1117/12.444691
Event: International Symposium on Optoelectonics and Microelectronics, 2001, Nanjing, China

Abstract

When the AFM cantilever is mounted with a sharp diamond tip, in addition to controlling both the applied normal load on the tip and other machining parameters by the AFM electrical components, it is capable of conducting micro/nano-machining on the surface of single crystal silicon. Firstly in this research work the diamond tip based single asperity cutting experiments are conducted on silicon surface with different normal loads and cutting speed, in aiming to investigate the AFM based microcutting process and material removal mechanism for silicon-like brittle material on nanoscale. Secondly, the micro/nano-machining experiments are conducted on single crystal silicon surface with different detecting approaches for characterizing the features of the micro/nano-machined region in terms of material removal mechanism and chips forming characteristic under different normal loads. Furthermore, the contact interaction mechanism existed between the AFM diamond tip and the machined silicon surface during the micro/nano-machining process is simulated with finite element method. Finally, the wear mechanism of an atomic force microscope (AFM) diamond tip when conducting micro/nano-machining on a single crystal silicon surface is empirically analyzed. The results indicate that the AFM based v has a precisely dimensional controllability and a good surface quality on nanometer scale.

Citation Download Citation

Qingliang Zhao, Tao Sun, Ying-Chun Liang, Shen Dong, and Mingjun Chen "Atomic force microscope using a diamond tip: a tool for micro/nanomachining on single-crystal silicon surface", Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, (15 October 2001); https://doi.org/10.1117/12.444691

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available